Ionizer
Ionizing bar
MODEL MP aerobar 5635
The Model 5635 AeroBar MP ionizing bar is specifically designed to eliminate static charge in semiconductor and other clean manufacturing processes where fast discharge time, low swing voltages, and precision balance are required. The Model 5635 utilizes MP technology, combining a high-frequency sine wave with modulated pulses (MP) for high ion output and delivery. This breakthrough technology enables AeroBar mounting within 150 mm of the wafer. MP technology, combined with ultraclean emitter points and precision adjustment, provides “Extended ISO Class 1*” cleanliness, critical for
smaller technology nodes. For processes that do not require extreme cleanliness, the optional air-assist accelerates ion delivery, providing faster discharge times and performance over longer distances.
MP technology is easy to adjust and features the ability to fine-tune voltage, frequency and balance to meet differing environmental and product sensitivity requirements. Available with either 50 mm or 75mm nozzle spacing, the Model 5635 provides solutions for a variety of applications.
| Features |
|
| 5635 common specification | |
| Ion Emission | Modulated Pulse(MP) technology |
| Balance control | Auto balancing system <±20V over time and across the bar length (measured in a controlled environment at 24” distance) |
| Input | DC24V(±10%) 0.25A(450mm) to 0.7A(2350mm) Typ |
| Output Voltage | 13.5kVp-p(max),adjustable |
| Control | Output voltage,Frequency |
| Air supply | Clean dry air or nitrogen |
| Airflow(optional) | 1-3.5lpm/nozzle 45psi max gas pressure,8mm OD one-touch fitting |
| Emitter points | Single Crystal Sillicon |
| Safty | excess current control circuit,High voltage sield structure |
| Certificates | RoHS compliant , CE marking |
| MODEL 5635 each specifications by length | ||
| 5635-450 | ||
| Dimensions | 450(L)x34(W)x78(H)mm |
|
| Emitterpoints | 8 | |
| Weight | 600g | |
| 5635-600 | ||
| Dimensions | 600(L)x34(W)x78(H)mm | |
| Emitterpoints | 11 | |
| Weight | 700g | |
| 5635-850 | ||
| Dimensions | 850(L)x34(W)x78(H)mm | |
| Emitterpoints | 11 | |
| Weight | 1100g | |
| 5635-1000 | ||
| Dimensions | 1000(L)ｘ34(W)ｘ78(H)mm | |
| Emitterpoints | 13 | |
| Weight | 1,100g | |
| 5635-1150 | ||
| Dimensions | 1150(L)ｘ34(W)ｘ78(L)mm | |
| Emitterpoints | 15 | |
| Weight | 1,200g | |
| 5635-1300 | ||
| Dimensions | 1300(L)ｘ34(W)ｘ78(H)mm | |
| Emitterpoints | 17 | |
| Weight | 1300g | |
| 5635-1450 | ||
| Dimensions | 1450(L)ｘ34(W)ｘ78(H)mm | |
| Emitterpoints | 19 | |
| Weight | 1500g | |
| 5635-1600 | ||
| Dimensions | 1600(L)ｘ34(W)ｘ78(H)mm | |
| Emitterpoints | 21 | |
| Weight | 1600g | |
| 5635-1750 | ||
| Dimensions | 1750(L)ｘ34(W)ｘ78(H)mm | |
| Emitterpoints | 23 | |
| Weight | 1700g | |
| 5635-1900 | ||
| Dimensions | 1900(L)ｘ34(W)ｘ78(H)mm | |
| Emitterpoints | 25 | |
| Weight | 1800g | |
| 5635-2050 | ||
| Dimensions | 2050(L)ｘ34(W)ｘ78(H)mm | |
| Emitterpoints | 27 | |
| Weight | 1900g | |
| 5635-2200 | ||
| Dimensions | 2200(L)ｘ34(W)ｘ78(H)mm | |
| Emitterpoints | 29 | |
| Weight | 2000g | |
| 5635-2350 | ||
| Dimensions | 2350(L)ｘ34(W)ｘ78(H)mm | |
| Emitterpoints | 31 | |
| Weight | 2100g | |