Ionizer
X-ray/VUV Ionizer
MODEL IUV-303
Only one technology for Ionizing in vacume chamber
The MODEL IUV-303 is designed to provide balanced Ionization performance in reduced pressure or an inert gas environment in various processes.
The Model IUV-303 utilizes vacuum ultraviolet for ionization and can solve an electrostatic problem which is difficult for conventional ionization systems to solve.
Feature
- (1)Eliminating electrostatic charges in inert gas, such as N2
- Model IUV-303 can efficiently ionize inert gas by utilizing a unique ionization method through multi-photon absorption of gas molecules.
- (2)Quick Decay time
- It can decay a charge till 1/10 from an original charge of wafer, in 1 or 2 seconds in a normal pressure environment, and only in several milliseconds in a decompression environment.
（Effectiveness under reduced pressure range：10-3～1000torr) - (3)Maintaining precise balance without sensors
- Offset VOLTAGE is about 0v
- (4)Not Affected by gas-flow
- UV ionization method irradiates widely, so it can stabilize ionizing gasses without any gas-flow influence.
- (5)No Electromagnetic noise
- UV ionization method eliminates noise generation.
- (6)It can be used for all manufacturing tools.
- VUV ionizer consists of Lamp, Vacuum Flange and controller. So it is easy to install it onto manufacturing tools.
- (7)Low maintenance
- Periodic cleaning and calibration are not required. Lamp replacement is only required.
Relation between distance from UV and decay time
Relation between decay time and N2pressure environment
| Specifications | ||
| LAMP | ||
| Model Number | UVL-30 | |
| UV wavejenght | ～400nm | |
| Window Material | MgF2 | |
| Cooling Method | Natural Air-cooling | |
| Preheating time for operation | Approx. 20sec | |
| Discharge Beginning Potential | 350VDC | |
| Discharge Maintaining Potential | Approx. 180VDC | |
| Mass | Approx. 50g | |
| VACUUM FLANGE | ||
| Model Number | UVF-30(NW,ICF,JIS) | |
| Mass | Approx. 250g | |
| Leak amount | 1×10-6torr・L/sec | |
| POWER UNIT | ||
| Model Number | PU-UV-303 | |
| Dementions | 117(W)×90(H)×200(D) | |
| Mass | Approx. 1800g | |
| Input Voltage | 100-240VAC ,50/60Hz | |
| Power Consumption | Approx. 90VA | |
| Cooling Method | Air-Cooling | |
| Output for Anode | 80±20VDC,300±30mA | |
| Trigger Voltage | 700VDC or more | |
| Indicator | Poewr ON : GREEN LED Lamp ON : Yellow LED |
|
| Interface | On-off control,LAMP turn on signal | |
| Output Cable | 1.8m,3-core | |
| built-in fuse | 2.0A | |
※Don’t watch the light directly and don’t gaze UV light a long time.
※external operation hour-meter is option.